Average Reviews:
(More customer reviews)It is an excellent book for beginners who need a good understanding of the basic unit processes associated with a standard microelectronic foundry. It gives a quick reference to almost everything in modern processing and refers to a variety of textbooks and journals for further information. In summary, this is the book you must have if you are in the semiconductor profession and require a quick but useful reference to almost everything in the business.
Click Here to see more reviews about: Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition)
This introductory book assumes minimal knowledge of the existence of integrated circuits and of the terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors. It presents to readers the basic information necessary for more advanced processing and design books. Focuses mainly on the basic processes used in fabrication, including lithography, oxidation, diffusion, ion implementation, and thin film deposition. Covers interconnection technology, packaging, and yield. Appropriate for readers interested in the area of fabrication of solid state devices and integrated circuits.
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